Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring

doi:10.1016/j.measurement.2023.112745

IOCAS-IR

	Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring
	Wang, Shaoyi 1; Li, Shoujie 1; Ye, Wangquan 1; Song, Wenhua 1; Zhang, Xuanbo 1; Tian, Ye 1; Guo, Jinjia 1; Zhang, Xin 2; Zheng, Ronger 1; Lu, Yuan 1
	2023-06-15
发表期刊	MEASUREMENT
ISSN	0263-2241
卷号	214 页码:8
通讯作者	Lu, Yuan(luyuan@ouc.edu.cn)
摘要	Signal fluctuation is an important issue in confocal measurements because minor intensity variation would cause a distinct deviation in the measurement result. In this work, it is proposed to use laser modulation and power monitoring to suppress the signal fluctuation in confocal measurements. The power monitoring is utilized to obtain the reference signal for correcting detection intensities, and the laser was operated at a modulated frequency to avoid unexpected vibrations from the ambient environment. The results indicated that the detection stability was well improved at least 3 times in the proposed way. Based on that, the precise measurement was successfully realized to resolve the nanometer-scaled structure of a blazed grating, and the surface topography was also achieved for a SIM card in a range of 40 & mu;m. The proposed way is practical in confocal measurements, and it is hoped to be applied in more applications.
关键词	Signal fluctuation suppression Confocal measurement Power monitoring Laser modulation Tomography
DOI	10.1016/j.measurement.2023.112745
收录类别	SCI
语种	英语
资助项目	National Key Research and Development Program of China[2019GHZ010] ; Shandong Province Special Funding for Laoshan Laboratory ; Provincial Key Research and Development Program of Shandong, China[12174359] ; Natural Science Foundation of Shandong Province[2021QNLM0200033] ; National Natural Science Foundation of China ; [2022YFC2803800] ; [ZR2020MF123]
WOS研究方向	Engineering ; Instruments & Instrumentation
WOS类目	Engineering, Multidisciplinary ; Instruments & Instrumentation
WOS记录号	WOS:001054349800001
出版者	ELSEVIER SCI LTD
WOS关键词	LATERAL RESOLUTION ; AXIAL RESOLUTION ; MICROSCOPY ; SUPERRESOLUTION
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.qdio.ac.cn/handle/337002/182877
专题	中国科学院海洋研究所
通讯作者	Lu, Yuan
作者单位	1.Ocean Univ China, Coll Phys & Optoelect Engn, Qingdao 266100, Peoples R China 2.Chinese Acad Sci, Inst Oceanol, Qingdao 266071, Peoples R China
推荐引用方式 GB/T 7714	Wang, Shaoyi,Li, Shoujie,Ye, Wangquan,et al. Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring[J]. MEASUREMENT,2023,214:8.
APA	Wang, Shaoyi.,Li, Shoujie.,Ye, Wangquan.,Song, Wenhua.,Zhang, Xuanbo.,...&Lu, Yuan.(2023).Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring.MEASUREMENT,214,8.
MLA	Wang, Shaoyi,et al."Signal fluctuation suppression in confocal measurements by laser modulation and power monitoring".MEASUREMENT 214(2023):8.